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We have access to two fully equipped cleanrooms on SFU campus within the Faculties of Science and Applied Science. We also have in-house access to further fabrication
tools for our specific requirements including vacuum oven for packaging, an electrospinning setup, electrochemical etch stop, and vapour HF release system. Our group has developed several fabrication processes based on silicon, glass, or polymer susbtrates. Many of the past projects were conducted in collaboration with industrial partners.

We can develop complete process flows or provide recipes for individual steps.

Available micro/nano-fabrication processes include:
Lithography:
  • UV Photolithography
  • Direct laser writing
  • E-beam lithography
Etching:
  • Reactive Ion Etching (RIE)
  • Deep RIE (DRIE)
  • Laser micromachining/dicing
  • Wet etching
  • Vapour HF etching
  • XeF2 etching
Deposition:
  • Sputtering
  • Evaporation
  • Chemical Vapour Deposition
  • Atomic Layer Deposition
  • Electro-spraying
  • Epitaxial growth
Other processes:
  • Rapid thermal processing
  • Doping
  • Electroplating
  • Polymer processing
  • Vacuum packaging
  • Wire bonding